真空塗装機における電流センサーの応用

The application of the current sensor on the vacuum coating machine is mainly used to monitor and control the current. In the vacuum coating machine, due to the large temperature change in the high vacuum environment, the sensor may be affected by the temperature, resulting in a deviation in the output current value. If the temperature drift of the current sensor is large, the current control of the system will be inaccurate, thereby affecting the deposition rate and thickness uniformity of the film. If the accuracy of the current sensor is low, that is, there is a large deviation between the output current value and the real value, the system will not be able to accurately control the deposition rate and film thickness. Especially for some applications that require high film quality, such as optical coating, a current sensor with low accuracy may cause the optical properties of the film to be unstable or not meet the specification requirements. In the traditional way, the Hall current sensor is commonly used to detect the current value. However, the traditional Hall current sensor has problems such as large temperature difference and insufficient precision, which restrict the performance and stability of the vacuum coating machine.